@conference{194226,
  author = {James Potzick},
  title = {Practical Photomask Linewidth Measurement},
  year = {1990},
  number = {1261},
  month = {1990-12-31},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control, San Jose, CA},
  language = {en},
}