@article{191136, author = {John Dagata and F Perez-murano and G Abadal and K Morimoto and T Inoue and J Itoh and H Yokoyama}, title = {Predictive Model for Scanned Probe Oxidation Kinetics}, year = {2000}, number = {76(19)}, month = {2000-01-01}, publisher = {Applied Physics Letters}, language = {en}, }