@conference{191046,
  author = {Richard Silver and Ravikiran Attota and M Bishop and Jay Jun and Egon Marx and M Davidson and Robert Larrabee},
  title = {High-Resolution Optical Overlay Metrology},
  year = {2004},
  number = {5375},
  month = {2004-05-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA},
  language = {en},
}