@conference{191036,
  author = {John Villarrubia and Andras Vladar and J Lowney and Michael Postek and Richard Allen and Michael Cresswell and Rathindra Ghoshtagore},
  title = {Linewidth Measurement Intercomparison on a BESOI Sample},
  year = {2000},
  number = {3998},
  month = {2000-06-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA},
  language = {en},
}