@conference{190911, author = {Ronald Dixson and R Koning and V Tsai and Joseph Fu and Theodore Vorburger}, title = {Dimensional Metrology with the NIST Calibrated Atomic Force Microscope}, year = {1999}, number = {3677}, month = {1999-06-01}, publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA}, language = {en}, }