@conference{190796,
  author = {Richard Silver and Theodore Doiron and William Penzes and S Fox and Edward Kornegay and S Rathjen and M Takac and D Owen},
  title = {Two-Dimensional Calibration Artifact and Measurement Methodology},
  year = {1999},
  number = {3677},
  month = {1999-06-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA},
  language = {en},
}