@article{190786,
  author = {Theodore Doiron and Theodore Vorburger and P Sullivan},
  title = {Effects of Defocus and Algorithm on Optical Step Height Calibration},
  year = {1999},
  number = {23(3)},
  month = {1999-07-01},
  publisher = {Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology},
  language = {en},
}