@article{190566,
  author = {Michael Postek and Andras Vladar and Marylyn Bennett},
  title = {Photomask Dimensional Metrology in the Scanning Electron Microscope, Part I: Has Anything Really Changed?},
  year = {2004},
  number = {3},
  month = {2004-04-01},
  publisher = {Journal of Microlithography Microfabrication and Microsystems},
  language = {en},
}