@article{190481, author = {John Dagata and F Perez-murano and C Martin and H Kuramochi and H Yokoyama}, title = {Current, Charge, and Capacitance During Scanning Probe Oxidation. I. Maximum Charge Density and Lateral Diffusion}, year = {2004}, number = {96}, month = {2004-08-15}, publisher = {Journal of Applied Physics}, language = {en}, }