@article{190356,
  author = {Joseph Fu and Hui Zhou and John Kramar and Richard Silver and S Gonda},
  title = {Dependency of Morphology on Miscut Angle for Si(111) Etched in NH<sub>4</sub>F},
  year = {2003},
  number = {82},
  month = {2003-05-01},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823151},
  language = {en},
}