@conference{190266,
  author = {Ndubuisi Orji and Jayaraman Raja and Theodore Vorburger and Xiaohong Gu},
  title = {Space-Scale Analysis of Line Edge Roughness on 193 nm Lithography Test Structures},
  year = {2003},
  month = {2003-10-01},
  publisher = {American Society for Precision Engineering, Annual Meeting | 18th | Proceedings of ASPE 18th Annual Meeting | American Society for Precision Engineering},
  language = {en},
}