@conference{190181,
  author = {Michael Postek and Andras Vladar and T Rice and R Knowles},
  title = {Potentials for High-Pressure/Environmental SEM Microscopy for Photomask Dimensional Metrology},
  year = {2003},
  number = {5038},
  month = {2003-05-01},
  publisher = {Proceedings of SPIE on Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor May 2003},
  language = {en},
}