@article{190166, author = {J Liddle and M Blakey and T Saunders and R Farrow and L Fetter and C Kneurek and R Kasica and et al and M Peabody and Shannon Takach and D Windt and Michael Postek}, title = {Metrology of Scattering with Angular Limitation Projection Electron Lithography Masks}, year = {1997}, number = {15(6)}, month = {1997-11-01}, publisher = {Journal of Vacuum Science and Technology B}, language = {en}, }