@conference{190116,
  author = {Richard Silver and Michael Stocker and Ravikiran Attota and M Bishop and Jay Jun and Egon Marx and M Davidson and Robert Larrabee},
  title = {Calibration Strategies for Overlay and Registration Metrology},
  year = {2003},
  number = {5038},
  month = {2003-05-01},
  publisher = {Proceedings of SPIE Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor May 2003, Santa Clara, CA},
  language = {en},
}