@conference{189946,
  author = {John Villarrubia},
  title = {Issues in Line Edge and Linewidth Roughness Metrology},
  year = {2005},
  number = {788},
  month = {2005-09-09},
  publisher = {Proceedings of American Institute of Physics International Conference on Characterization and Metrology for ULSI Technology 2005, Richardson, TX},
  language = {en},
}