@conference{189936,
  author = {Hui Zhou and Joseph Fu and S Gonda and Richard Silver},
  title = {Effects of Etching Time and Wafer Miscut on the Morphology of Etched Si(111) Surfaces},
  year = {2002},
  number = {4608},
  month = {2002-01-01},
  publisher = {Procedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD},
  language = {en},
}