@conference{189876,
  author = {Ronald Dixson and Theodore Vorburger and Angela Guerry and Marylyn Bennett and B Bunday},
  title = {Implementation of a Reference Measurement System Using CD-AFM},
  year = {2003},
  number = {5038},
  month = {2003-05-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA},
  language = {en},
}