@conference{189846,
  author = {S Fox and Mario Dagenais and Edward Kornegay and Richard Silver},
  title = {Focus and Edge Detection Algorithms and Their Relevance to the Development of an Optical Overlay Calibration Standard},
  year = {1999},
  number = {3677},
  month = {1999-06-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA},
  language = {en},
}