@conference{189826,
  author = {John Kramar and E Amatucci and David Gilsinn and Jay Jun and William Penzes and Fredric Scire and E Teague and John Villarrubia},
  title = {Toward Nanometer Accuracy Measurements},
  year = {1999},
  number = {3677},
  month = {1999-06-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA},
  language = {en},
}