@conference{189486,
  author = {T Mcwaid},
  title = {Finish and Figure Metrology for Soft X-ray Optics},
  year = {1997},
  month = {1997-01-01},
  publisher = {Proceedings of Japan Society for Precision Engineering: U.S.-Japan Workshop on Soft X-ray Optics: Technical Challenges, T. Namioka, H. Kinoshita, and K. Ito, Editors, Tokyo, JA},
  language = {en},
}