@conference{189311,
  author = {Ronald Dixson and R Koning and Joseph Fu and Theodore Vorburger and Thomas Renegar},
  title = {Accurate Dimensional Metrology With Atomic Force Microscopy},
  year = {2000},
  number = {3998},
  month = {2000-06-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA},
  language = {en},
}