@conference{189306, author = {John Villarrubia}, title = {Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy}, year = {1998}, number = {3332}, month = {1998-06-01}, publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor}, language = {en}, }