@article{189251,
  author = {Michael Postek and Andras Vladar and J Lowney and William Keery},
  title = {Two-Dimensional Simulation and Modeling in Scanning Electron Microscope Imaging and Metrology Research},
  year = {2002},
  number = {24},
  month = {2002-07-01},
  publisher = {Scanning},
  language = {en},
}