@conference{189186,
  author = {John Villarrubia and Andras Vladar and J Lowney and Michael Postek},
  title = {Edge Determination for Polycrystalline Silicon Lines on Gate Oxide},
  year = {2001},
  number = {4344},
  month = {2001-08-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA},
  language = {en},
}