@conference{189056,
  author = {Michael Postek and Andras Vladar and Marylyn Bennett},
  title = {Photomask Dimensional Metrology in the SEM: Has Anything Really Changed?},
  year = {2002},
  number = {4889},
  month = {2002-12-01},
  publisher = {Proceedings of SPIE, 22nd Annual BACUS Symposium on Photomask Technology, Brian J. Grenon, Kurt R. Kimmel, Editors, Monterey, CA},
  language = {en},
}