@conference{189036,
  author = {Bradley Damazo and Andras Vladar and Alice Ling and M Donmez and Michael Postek and Crossley Jayewardene},
  title = {SEM Sentinel - SEM Performance Measurement System},
  year = {2001},
  month = {2001-01-01},
  publisher = {Metrology, Inspection, and Process Control for Microlithography XV, Conference |15th | Metrology, Inspection, and Process Control for Microlithography XV | SPIE},
  language = {en},
}