@conference{188931,
  author = {James Potzick},
  title = {Improving Photomask Linewidth Measurement Accuracy via Emulated Stepper Aerial Image Measurement},
  year = {1994},
  number = {2322},
  month = {1994-12-01},
  publisher = {Proceedings of SPIE, Santa Clara, CA},
  language = {en},
}