@article{188811,
  author = {John Villarrubia and Andras Vladar and J Lowney and Samuel Jones and Michael Postek},
  title = {Applications of SEM Monte Carlo Modeling to Geometry Determination in Single-Crystal Silicon Test Patterns},
  year = {2000},
  number = {22(2)},
  month = {2000-05-01},
  publisher = {Scanning},
  language = {en},
}