@conference{188781,
  author = {John Kramar and Jay Jun and William Penzes and Fredric Scire and E Teague and John Villarrubia},
  title = {Grating Pitch Measurements With the Molecular Measuring Machine},
  year = {1999},
  number = {3806},
  month = {1999-11-01},
  publisher = {Proceedings of SPIE,, Denver, CO},
  language = {en},
}