@article{188721,
  author = {John Villarrubia and Andras Vladar and J Lowney and Michael Postek},
  title = {Shape-Sensitive Linewidth Measurement with the SEM Using a Model-Based Library},
  year = {2001},
  number = {23(2)},
  month = {2001-03-01},
  publisher = {Proceedings of SCANNING 2001 May 5-7, 2001 New York, New York, USA},
  language = {en},
}