@conference{188626, author = {Richard Silver and Jay Jun and Edward Kornegay and R Morton}, title = {Comparison of Edge Detection Methods Using a Prototype Overlay Calibration Artifact}, year = {2001}, number = {4344}, month = {2001-08-01}, publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor}, language = {en}, }