@conference{188621,
  author = {John Villarrubia and Ronald Dixson and Samuel Jones and J Lowney and Michael Postek and Richard Allen and Michael Cresswell},
  title = {Intercomparison of SEM, AFM, and Electrical Linewidths},
  year = {1999},
  number = {3677},
  month = {1999-06-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor},
  language = {en},
}