@conference{188616,
  author = {John Villarrubia and Andras Vladar and J Lowney and Michael Postek},
  title = {Scanning Electron Microscope Analog of Scatterometry},
  year = {2002},
  number = {4689},
  month = {2002-07-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVI, Daniel J. C. Herr, Editor, Santa Clara, CA},
  language = {en},
}