@conference{188556,
  author = {James Potzick},
  title = {Optical Photomask CD Metrology at NIST},
  year = {2003},
  month = {2003-11-01},
  publisher = {Proceedings of the 188th PTB Seminar on CD Metrology; H. Bosse, B. Bodermann, W. Mirande` Editors; Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, GE},
  language = {en},
}