@conference{188526,
  author = {Egon Marx and I Malik and T Bristow and N Poduje and J Stover},
  title = {Power Spectral Density Functions for Si Wafer Surfaces Using Six Measurement Techniques},
  year = {2000},
  month = {2000-01-01},
  publisher = {Proceedings of 2000 International Conference on Characterization and Metrology},
  language = {en},
}