@conference{188506,
  author = {Samuel Dongmo and John Villarrubia and Samuel Jones and Thomas Renegar and Michael Postek and Jun-Feng Song},
  title = {Tip Characterization for Scanned Probe Microscope Width Metrology},
  year = {1998},
  month = {1998-03-01},
  publisher = {Characterization and Metrology for ULSI Technology 1998 International Conference},
  language = {en},
}