@conference{188471,
  author = {Michael Postek},
  title = {Nanometer-Scale Metrology: Meeting the Nanotechnology Measurement Challenges},
  year = {2002},
  number = {4608},
  month = {2002-07-01},
  publisher = {Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD},
  language = {en},
}