@conference{188461,
  author = {John Villarrubia and Andras Vladar and Michael Postek},
  title = {A Simulation Study of Repeatability and Bias in the CD-SEM},
  year = {2003},
  number = {5038},
  month = {2003-05-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA},
  language = {en},
}