@conference{188451,
  author = {James Potzick},
  title = {New Certified Length Scale for Microfabrication Metrology},
  year = {1996},
  number = {2880},
  month = {1996-09-01},
  publisher = {Proceedings of SPIE, Microlithography and Metrology in Micromachining II, Michael T. Postek, Jr., Craig R. Friedrich, Editors, Austin, TX},
  language = {en},
}