@conference{188011,
  author = {Ronald Dixson and R Koning and Theodore Vorburger and Joseph Fu and V Tsai},
  title = {Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope},
  year = {1998},
  number = {3332},
  month = {1998-06-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA},
  language = {en},
}