@article{186156, author = {John Beers and William Penzes}, title = {The NIST Length Scale Interferometer}, year = {1999}, number = {104(3)}, month = {1999-05-01}, publisher = {Journal of Research of the National Institute of Standards and Technology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=820924}, language = {en}, }