@article{186146,
  author = {R Farrow and Michael Postek and William Keery and Samuel Jones and J Lowney and M Blakey and L Fetter and J Griffith and J Liddle and L Hopkins and H Huggins and M Peabody and A Novembre},
  title = {Application of Transmission Electron Detection to SCALPEL Mask Metrology},
  year = {1997},
  number = {15(6)},
  month = {1997-11-01},
  publisher = {Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=820894},
  language = {en},
}