@conference{18531,
  author = {Pragya Shrestha and Kin Cheung and Jason Ryan and Jason Campbell and Helmut Baumgart},
  title = {Fast-Capacitance for Advanced Device Characterization},
  year = {2014},
  month = {2014-03-03},
  publisher = {2012 IEEE International Integrated Reliability Workshop Final Report, Fallen Leaf Lake, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914753},
  language = {en},
}