@conference{184661,
  author = {Cedric Powell and Aleksander Jablonski},
  title = {Measurement of Silicon Dioxide Film Thicknesses by X-ray Photoelectron Spectroscopy},
  year = {2001},
  number = {550},
  month = {2001-02-01},
  publisher = {Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP},
  language = {en},
}