@article{184651,
  author = {P Chi and David Simons and J McKinley and F Stevie and C Granger},
  title = {High Precision Measurements of Arsenic and Phosphorous Implantation Dose in Silicon by Secondary Ion Mass Spectrometry},
  year = {2002},
  number = {20},
  month = {2002-06-01},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}