@article{184581,
  author = {Mark Sobolewski and Yicheng Wang and A Goyette},
  title = {Measurements and Modeling of Ion Energy Distributions in High-Density, Radio-Frequency Biased CF<sub>4</sub> Discharges},
  year = {2002},
  number = {91},
  month = {2002-05-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}