@misc{184476,
  author = {C Taylor and Richard Cavicchi and Stephen Semancik},
  title = {MEMS Device Platforms as Research Tools for Developing Improved Sensing Films},
  year = {2002},
  month = {2002-02-01},
  publisher = {MEMS Device Platforms as Research Tools for Developing Improved Sensing Films},
  language = {en},
}