@conference{184181, author = {Dale Newbury and David Wollman and Sae Nam and Gene Hilton and Kent Irwin and John Small and John Martinis}, title = {Energy Dispersive X-ray spectromety by Microcalorimetry for the SEM}, year = {2002}, number = {138}, month = {2002-01-01}, publisher = {Book of Abstracts, European Microbeam Analysis Society Conference}, language = {en}, }