@article{1841, author = {Chukwudi Okoro and Lyle Levine and Yaw Obeng and Ruqing Xu}, title = {Experimental Measurement of the Effect of Copper Through-Silicon Via Diameter on Stress Buildup Using Synchrotron-based X-ray Source}, year = {2015}, number = {50}, month = {2015-06-20}, publisher = {Journal of Materials Science}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917647}, language = {en}, }