@conference{183801,
  author = {Kenneth Kreider and D DeWitt and Christopher Meyer and Vincent Scheuerman},
  title = {Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 C},
  year = {2000},
  month = {2000-04-01},
  publisher = {8th International Symposium on Advanced Thermal Processing of Semiconductors},
  language = {en},
}